| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an applicator using a die head for discharging a coating liquid which can correspond to the upsizing of a substrate and curtail a substrate replacement time. <P>SOLUTION: An installation table 3 is arranged on the conveyance route B of a substrate conveying conveyer A, and a rail 20 is formed perpendicularly to the conveyance direction of the substrate G. The die head 23 is supported movably on the rail 20 with its longitudinal direction turned in the conveyance direction. The support member 21 of the rail 20 is arranged outside the width direction of the conveyance route B. In the applicator 1, a conveyance passage arranged from the outside of the applicator 1 toward the inside of the applicator 1 is secured, and the substrate G can be conveyed into the applicator 1 by using the conveyer A. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
