| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus using a laser ablation method, which measure a sample while enhancing SN ratios. SOLUTION: In the method, the surface of a substrate 1 to which the sample is attached, is irradiated with laser light 4 having an attribute neither higher than an ablation threshold value for the substrate 1 nor lower than an ablation threshold value for the sample, and plasma emission light 6 generated by the sample ablation is subjected to a spectroscopic analysis, thereby measuring components of the sample. In a preferable method, a probe is used as the substrate 1, and the sample to be measured is attached to the probe 1, and a section 2 of the probe 1 to which the sample is attached, is irradiated with laser light 4 having an attribute neither higher than an ablation threshold value for the probe 1 nor lower than the ablation threshold value for the sample. In a further preferable method, the wavelength of the laser light 4 is made long, and the difference between the ablation threshold value A2 for the probe 1 and the the ablation threshold value A1 for the sample, i.e., a value (=A2-A1) is made large, and for that purpose, carbon dioxide laser light is used as the laser light 4, and the probe 1 is made of a metal, for example. COPYRIGHT: (C)2005,JPO&NCIPI
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