发明名称 Sensor element having an integrated reference pressure
摘要 A pressure sensor includes a pressure sensor house assembly which contains a reference cavity, in which a vacuum exists, and a getter capable of being thermally activated. The getter is activated by directly contacting the getter with an exterior heated body, conducting heat from the exterior heated body, maintaining the exterior heated body in direct contact with the getter for a predetermined period of time, and removing the exterior heated body.
申请公布号 US2004211262(A1) 申请公布日期 2004.10.28
申请号 US20040774493 申请日期 2004.02.10
申请人 MKS INSTRUMENTS INC. 发明人 JONSSON STAFFAN
分类号 G01L7/08;G01L9/00;(IPC1-7):G01R3/00 主分类号 G01L7/08
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