发明名称 |
APPLICABLE CERAMIC MATERIAL AND METHOD FOR PRODUCING THE SAME |
摘要 |
<P>PROBLEM TO BE SOLVED: To form a ceramic film having excellent film properties. <P>SOLUTION: The applicable ceramic material is produced by agitating a raw material 1 containing a multiple oxide in the presence of a platinum group element catalyst 2 and using a sol/gel raw material containing at least either a hydrolyzate of the multiple oxide or a polycondensate of the multiple oxide as the raw material 1. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
申请公布号 |
JP2004299921(A) |
申请公布日期 |
2004.10.28 |
申请号 |
JP20030091717 |
申请日期 |
2003.03.28 |
申请人 |
SEIKO EPSON CORP |
发明人 |
KIJIMA TAKESHI;NATORI EIJI |
分类号 |
C04B35/49;B01F3/12;C01B13/32;C01B33/00;C01B33/14;C01G25/00;C04B35/16;C04B35/462;C04B35/491;C04B35/624;C04B35/628;C09D1/00;C23C18/12;H01L27/10 |
主分类号 |
C04B35/49 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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