发明名称 APPLICABLE CERAMIC MATERIAL AND METHOD FOR PRODUCING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To form a ceramic film having excellent film properties. <P>SOLUTION: The applicable ceramic material is produced by agitating a raw material 1 containing a multiple oxide in the presence of a platinum group element catalyst 2 and using a sol/gel raw material containing at least either a hydrolyzate of the multiple oxide or a polycondensate of the multiple oxide as the raw material 1. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004299921(A) 申请公布日期 2004.10.28
申请号 JP20030091717 申请日期 2003.03.28
申请人 SEIKO EPSON CORP 发明人 KIJIMA TAKESHI;NATORI EIJI
分类号 C04B35/49;B01F3/12;C01B13/32;C01B33/00;C01B33/14;C01G25/00;C04B35/16;C04B35/462;C04B35/491;C04B35/624;C04B35/628;C09D1/00;C23C18/12;H01L27/10 主分类号 C04B35/49
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