发明名称 PIEZOELECTRIC DRIVING APPARATUS
摘要 A driving apparatus, comprising a piezoelectric actuator (118) having a tip (108) displaceable in X,Y,Z three-axis directions, and a movable body (111) having translational movement freedom in X,Y two-axis directions, wherein the tip of the actuator is placed to be displaceable in Z-axis direction to come into pressure contact with the movable body, and the tip of the actuator under pressure contact is displaced within an XY-axis plane to move the movable body translationally in the direction of displacement of the tip of the actuator.
申请公布号 WO2004036727(A3) 申请公布日期 2004.10.28
申请号 WO2003JP13298 申请日期 2003.10.17
申请人 CANON KABUSHIKI KAISHA;SEKI, JUNICHI 发明人 SEKI, JUNICHI
分类号 H02N2/00;H01L41/09 主分类号 H02N2/00
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