| 摘要 |
PROBLEM TO BE SOLVED: To enable quick carry-in/out of a drying chamber without using a robot arm and a carrying belt, and to enable the stable carrying even in the case of drying by heating to dry by radiation. SOLUTION: In the drying chamber 12, the pressure inside the room is reduced by a pressure-reducing pump 13, and a heating device 18 for heating with the far infrared radiation is provided in an upper part inside the chamber. A carrying roller 31 for carrying glass boards G is provided inside the drying chamber 12. A vacuum additional chamber 21 having a carrying roller 32 is formed adjacent to a carry-in opening 14 side of the drying chamber 12, and a vacuum additional chamber 22 having a carrying roller 33 is formed adjacent to a carry-out opening 16 side thereof. Rollers structuring the dry carrying rollers 31 and 33 are arranged without generating an overlap with each other in a direction along the glass board G carrying direction. COPYRIGHT: (C)2005,JPO&NCIPI
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