| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum chuck whereby adhesion between its adsorbing surface and a work is improved by almost eliminating level differences made on the adsorbing surface of the vacuum chuck. SOLUTION: This vacuum chuck 1 is furnished with a porous body 10 having a surface 10a on which suction force works and a porous supporting body 5 on which a storage groove 7 to tightly store the porous body 10 in it is formed. The porous body 10 and the porous supporting body 5 are constituted of the same fluoride resin and both of them are connected to each other by welding on such the vacuum chuck 1. Consequently, the porous body 10 and the porous supporting body differently become porous or compact. Consequently, hardness and Young's modula of them extremely become approximate to each other, and it is possible to extremely reduce the level differences even when surfaces 5a, 10a of both of them are surface-ground and to improve the adhesion of the work and the adsorbing surface 1a. COPYRIGHT: (C)2005,JPO&NCIPI |
