| 摘要 |
PROBLEM TO BE SOLVED: To provide a stamper capable of precisely transferring the shape of the stamper to an article having to receive transfer without being affected by the distribution of the protrusions on the surface of the stamper or the undulation of a substrate, and a transfer device using the stamper. SOLUTION: Precise transfer not affected by the protrusions on the surface of the stamper or the undulation of the substrate can be performed using the stamper having a cushioning material, which has an elastic modulus distribution, formed on the back surface thereof. In the stamper, which has fine unevenness formed to the surface thereof, for forming a fine structure on the substrate using a press, the stamper has flexibility and the cushioning material having an in-plane distribution in elastic modulus is formed on the back surface of the unevenness formed surface of the stamper. COPYRIGHT: (C)2005,JPO&NCIPI |
