发明名称 Manufacturing method of CPP type magnetic sensor having current-squeezing path
摘要 On a multilayer film formed on a lower electrode layer, a resist layer having cutaway parts at a lower portion is formed, and on parts of the upper surface of the multilayer film which are not overlapped with the resist layer except for areas inside the cutaway parts, first gap layers are formed. Accordingly, a predetermined gap T1 can be formed between the first gap layers in the track width direction. Next, in the following step, two end surfaces of the multilayer film and the first gap layers in the track width direction are milled. Hence, according to the present invention, compared to the case in the past, the predetermined gap T1 provided between the first gap layers can be formed into a minute size with superior accuracy, the current path-squeezing structure can be easily formed, and a magnetic sensor having superior change in resistance (DeltaR) and reproduction output can be manufactured.
申请公布号 US2004214353(A1) 申请公布日期 2004.10.28
申请号 US20040828120 申请日期 2004.04.20
申请人 ALPS ELECTRIC CO., LTD. 发明人 NISHIYAMA YOSHIHIRO;SAITO MASAMICHI;AOKI DAIGO
分类号 G11B5/39;H01L43/08;H01L43/12;(IPC1-7):H01L21/00;G01R33/02 主分类号 G11B5/39
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