发明名称 |
Ceramic heater and support pin |
摘要 |
The present invention provides a ceramic heater which makes it possible to make the distance between a semiconductor wafer and the heating surface of a ceramic substrate constant at any time, heat the semiconductor wafer at an even temperature and prevent contamination of the semiconductor wafer, and which does not cause dropping-out of a supporting pin. The ceramic heater of the present invention comprises a ceramic substrate on a surface of which or inside which a heating element is formed, wherein the ceramic heater is constituted to have a structure that an object to be heated can be held apart from a surface of said ceramic substrate and heated.
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申请公布号 |
US2004211767(A1) |
申请公布日期 |
2004.10.28 |
申请号 |
US20010926012 |
申请日期 |
2001.10.24 |
申请人 |
HIRAMATSU YASUJI;ITO YASUTAKA |
发明人 |
HIRAMATSU YASUJI;ITO YASUTAKA |
分类号 |
H05B3/20;H01L21/00;H01L21/68;H01L21/683;H01L21/687;H05B3/14;H05B3/26;H05B3/28;(IPC1-7):H05B3/74 |
主分类号 |
H05B3/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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