PRECISION MOTION CONTROL USING FEED FORWARD OF ACCELERATION

摘要

High precision position control apparatus. An object supported on a frame of reference (10) is moved by an actuator (14). A position sensor (16) generates a position signal and an acceleration sensor (24) affixed to the frame of reference (10) generates an acceleration signal. A control system responds to the position signal and the acceleration signal to control the actuator (14) to move the object to follow a commanded trajectory with reduced following error.