| 摘要 |
<P>PROBLEM TO BE SOLVED: To generate an arc-discharge without arranging a trigger electrode as an arc vaporizing source. <P>SOLUTION: As an electric-power supplying means for supplying the power to the arc vaporizing source 6, a DC source 11 and a high voltage generating device 12 are connected. Then, the arc-discharge is generated by generating a sparking discharge by supplying the high voltage between a target cathode 7 and a shield plate 8 with the high voltage generating device 12. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
