| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for machining an object to be observed capable of shortening a time required for forming a film on the object to be observed, and a micromachining method. SOLUTION: An observation region 117 including foreign matter D is supposed on an air bearing surface 109 in order to observe the foreign matter D on the air bearing surface 109 of a slider 107 being the object to be observed. Then, the observation region 117 is covered with a first protective film 121. Succeedingly, the periphery of the observation region 117 is removed by FIB machining. Subsequently, the leading end part 129a of a probe 129 is brought into contact with the first protective film 121, and the part for covering the observing region 117 of the first protective film 121 and the leading end part 129a of the probe 129 are covered with a second protective film 131. Then, the probe 129 is moved to take out a micro-sample 127 from the slider 107. COPYRIGHT: (C)2005,JPO&NCIPI
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