DEFECT DETECTING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a defect detecting method for detecting a defect such as cracking and a crack while having high detecting capability of not becoming unclear in a boundary line of the defect such as the crack without rounding a corner part of the defect such as the crack. SOLUTION: This method detects the defect by etching an inspection object until at least a part of the defect existing inside the inspection object appears on a surface of the inspection object, and is the defect detecting method comprising an etching step of etching the inspection object by an anisotropic etching method being an etching method comprising a maximum etching speed in the prescribed direction. The etching step may include colliding a particle with the inspection object from the prescribed direction. The etching step may be performed by a dry process. COPYRIGHT: (C)2005,JPO&NCIPI