发明名称 CONFIGURATION FOR MANUFACTURING FACILITY AND METHOD OF TRANSPORTING PRODUCT
摘要 PROBLEM TO BE SOLVED: To provide a configuration for manufacturing facility by which a line configuration having a small number of bays and high space efficiency can be formed. SOLUTION: In this configuration for manufacturing facility, a central stocker C provided with a central transporting mechanism is disposed at the center of a manufacturing facility. A plurality of bays composed of a plurality of devices D, PH, E, and T used for the same process and bay stockers Bw11 containing intra-bay transporting mechanisms are radially connected to the central stocker C. Short-cut transporting mechanisms Sw11 which deliver and receive products between adjacent bays of the plurality of bays are provided between adjacent bay stockers Bw21. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004303833(A) 申请公布日期 2004.10.28
申请号 JP20030092865 申请日期 2003.03.28
申请人 FUJITSU DISPLAY TECHNOLOGIES CORP 发明人 WATANABE KAZUHIRO;TAKEBAYASHI ISAO;OTA YUICHIRO;KITANO MASARU;ISHII HIDEO
分类号 B65G1/00;B65G49/07;H01L21/677;H01L21/68;(IPC1-7):H01L21/68 主分类号 B65G1/00
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