发明名称 |
CONFIGURATION FOR MANUFACTURING FACILITY AND METHOD OF TRANSPORTING PRODUCT |
摘要 |
PROBLEM TO BE SOLVED: To provide a configuration for manufacturing facility by which a line configuration having a small number of bays and high space efficiency can be formed. SOLUTION: In this configuration for manufacturing facility, a central stocker C provided with a central transporting mechanism is disposed at the center of a manufacturing facility. A plurality of bays composed of a plurality of devices D, PH, E, and T used for the same process and bay stockers Bw11 containing intra-bay transporting mechanisms are radially connected to the central stocker C. Short-cut transporting mechanisms Sw11 which deliver and receive products between adjacent bays of the plurality of bays are provided between adjacent bay stockers Bw21. COPYRIGHT: (C)2005,JPO&NCIPI
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申请公布号 |
JP2004303833(A) |
申请公布日期 |
2004.10.28 |
申请号 |
JP20030092865 |
申请日期 |
2003.03.28 |
申请人 |
FUJITSU DISPLAY TECHNOLOGIES CORP |
发明人 |
WATANABE KAZUHIRO;TAKEBAYASHI ISAO;OTA YUICHIRO;KITANO MASARU;ISHII HIDEO |
分类号 |
B65G1/00;B65G49/07;H01L21/677;H01L21/68;(IPC1-7):H01L21/68 |
主分类号 |
B65G1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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