| 摘要 |
PROBLEM TO BE SOLVED: To provide a vapor generator which supplies vapor stably and efficiently, generates the vapor for a short period of time, has a simplified structure, and requires easy maintenance. SOLUTION: The vapor generator is equipped with a liquid tank part 1 for retaining a liquid, a vaporizing part 2 which is connected with the liquid tank part directly and generates the vapor by heating the liquid supplied from the liquid tank part, a vapor retaining part 3 which is connected with the vaporizing part directly and retains the vapor generated by the vaporizing part, a lead-out passage 4 which is connected with the vapor retaining part 3 directly and leads the vapor generated by the vaporizing part to the outside, a liquid passage 10b which is connected with the liquid tank and supplies the liquid, and a heater part 20 which is provided on one side surface of the vaporizing part 2 and heats at least the vaporizing part 2. The liquid tank 1, the vaporizing part 2, the vapor retaining part 3, the lead-out passage 4, and the liquid passage 10b are formed in an integral article made of a translucent material. COPYRIGHT: (C)2005,JPO&NCIPI
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