CLEANING SHEET, ITS MANUFACTURING METHOD, AND TRANSPORTING MEMBER HAVING THE SHEET

摘要

PROBLEM TO BE SOLVED: To provide a cleaning sheet that can remove foreign matters adhering to the probe of a probe card without wearing the probe in a state that the removed foreign matters are not allowed to again adhere to the probe and part of the cleaning layer of the sheet is not transferred to the probe; and to provide a method of manufacturing the sheet, a method of cleaning the sheet, and a transporting member having the sheet. SOLUTION: The cleaning sheet has the cleaning layer which is constituted so that its surface constitutes at least one surface of the cleaning sheet and contains an urethane polymer and a vinyl polymer. The cleaning sheet is manufactured by forming the cleaning layer by curing a mixture containing the urethane polymer and the vinyl polymer by projecting radiation upon the mixture. The transporting member has this cleaning sheet. COPYRIGHT: (C)2005,JPO&NCIPI