| 摘要 |
PROBLEM TO BE SOLVED: To provide a dust removal system in a transport process in which a production yield is improved and product quality is assured by preventing retention of dust in the periphery of a transport part for a product without reducing productivity to prevent dust from sticking to the product. SOLUTION: A holder 11 having the same shape as the product is constituted by a substance whose surface resistance value is 10<SP>10</SP>Ωor above, and thrown in a line 1a by which the product is transported, to travel. The holder 11 which has travelled on the line 1a is distributed to a dust removal part 20, and mounted on an electrically grounded stage 21 to discharge, so that the dust sticking to the holder 11 is removed. The removed dust is sucked with a hose 22 to collect and analyze with a dust counter 24. The result of the analysis is transmitted to a control device to decide a transport rule for the holder 11. COPYRIGHT: (C)2005,JPO&NCIPI
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