| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric displacement element and a piezoelectric actuator in which the in-face fluctuation of piezoelectric characteristics is reduced although the thickness of a piezoelectric ceramic layer is 50μm or less, and the overall thickness is 100μm or less. SOLUTION: This piezoelectric displacement element is provided with a piezoelectric ceramic layer which is 50μm or less in thickness and at least a pair of electrodes arranged on the both faces of the piezoelectric ceramic layer, wherein the overall thickness is 100μm or less, and at least one of the pair of electrodes contains Ag, and Ag is uniformly distributed in the piezoelectric ceramic layer. This piezoelectric actuator 1 is configured by laminating a common electrode 5, a piezoelectric ceramic layer 4 which is 50μm or less in thickness and a surface electrode 6 in this order on a diaphragm 2, wherein a plurality of surface electrodes 6 are arrayed on the surface of the piezoelectric ceramic layer 4, and the common electrode 5 contains Ag, and Ag is uniformly distributed in the piezoelectric ceramic layer 4, and the overall thickness is 100μm or less. COPYRIGHT: (C)2005,JPO&NCIPI
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