| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin filmy zinc oxide fluorescent substance which is needed for luminous devices having high performances and high functions and has a smooth film surface property, in other words, a compact fine structure, and highly uniform film thickness, to provide a method for producing the zinc oxide phosphor, further to provide a thin filmy zinc oxide phosphor which has excellent light transmissivity in a visible light region of bluish green visible light region, and to provide a method for producing the same. SOLUTION: This thin filmy zinc oxide phosphor containing zinc oxide as a main component and crystal layers is characterized in that the film thickness of the zinc oxide phosphor is 0.01 to 10μm and that the maximum cross section height of an outline curve in an evaluation length of 10μm is one fourth of the film thickness, when the film thickness is 0.01 to 0.80μm, and≤0.20μm, when the film thickness is 0.80 to 10μm. The method for producing the thin filmy zinc oxide phosphor comprises forming a precursor containing zinc oxide as a main component on a substrate, and then repeating the irradiation of active rays to grow the zinc oxide crystal particles in the film pressure direction. COPYRIGHT: (C)2005,JPO&NCIPI
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