发明名称 Flash memory and fabrication method thereof
摘要 A flash memory and a fabrication method thereof, which is capable of improving a whole capacitance of the flash memory by forming a tunneling oxide and a floating gate only in a portion where injection of electrons occurs. A flash memory wherein a tunneling oxide and a floating gate are formed only in a portion where injection of electrons occurs and a gate insulation film is formed on a semiconductor substrate between two portions of the tunneling oxide.
申请公布号 US2004214433(A1) 申请公布日期 2004.10.28
申请号 US20030747311 申请日期 2003.12.30
申请人 ANAM SEMICONDUCTOR INC. 发明人 PARK GEON-OOK
分类号 H01L21/28;H01L21/302;H01L21/461;H01L29/423;H01L29/788;(IPC1-7):H01L21/302 主分类号 H01L21/28
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