HIGH THROUGHPUT PLASMA TREATMENT SYSTEM

摘要

A system and method for the simultaneous plasma treatment of a plurality of parts in a treatment chamber. The system includes a transfer mechanism that is operable to load the plurality of parts at a plurality of treatment positions within the treatment chamber. The operation of the transfer mechanism is controlled by signals from an electronic control system. A guide is provided, either within the treatment chamber or outside the treatment chamber, along which each of the parts may be moved to the plurality of treatment positions. The guides may be arranged in multiple levels so that the treatment positions for the plurality of parts may be likewise arranged in multiple levels.