SYSTEM AND METHOD OF NON-LINEAR GRID FITTING AND COORDINATE SYSTEM MAPPING

摘要

A system and method of non-linear grid fitting and coordinate system mapping may employ data processing techniques for fitting a set of measured fiducial data to an ideal set of fiducials; thee fiducials may be arranged in a known (e.g., Cartesian grid) pattern on a substrate imaged by an imaging apparatus. Exemplary embodiments may model the non-linear transformation to and from imaged coordinates (i.e., coordinates derived from acquired image data) and artifact coordinates on the fiducial plate (i.e., actual coordinates of the fiducial relative to a reference point on the fiducial plate).