摘要 |
PROBLEM TO BE SOLVED: To provide a capacitive element n which the capacitance can be regulated in both increasing and decreasing directions. SOLUTION: The capacitive element comprises a first lower electrode 12a, a second lower electrode 12b and a third lower electrode 12c provided separately at three or more positions on a substrate 11, a dielectric layer 13 provided continuously on the substrate 11 while overlapping the first lower electrode 12a, a first resistor layer 14a provided across the dielectric layer 13 and the second lower electrode 12b not to be connected with the first lower electrode 12a, a second resistor layer 14b provided continuously across the third lower electrode 12c and the first lower electrode 12a, the second lower electrode 12b or a fourth lower electrode 12d through the substrate 11, and an upper electrode 15 provided at least on the first resistor layer 14a and across the first resistor layer 14a and the dielectric layer 13 on the first lower electrode 12a. COPYRIGHT: (C)2005,JPO&NCIPI
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