ALIGNMENT DEVICE, ALIGNMENT METHOD, AND ORGANIC EL ELEMENT MANUFACTURED BY USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an alignment device capable of exactly positioning a mask for film formation even when a tension is added and the position of alignment mark is shifted, and to provide an organic EL element manufactured by using the above. SOLUTION: Base plate marks 1a are formed in the vicinity of both ends of a virtual diagonal line on a glass base plate 1 so as to face each other. The alignment device comprises a base plate mark forming means 4 forming a parallel standard marks 1b located at such a position that the virtual lines passing through the base plate mark 1a and itself become parallel with each other; a mask mark forming means 5 forming mask marks 2a in the vicinity of both ends of virtual diagonal line on a mask 2 so as to face each other; an image obtaining means obtaining an image for measurement at the position where the mask is positioned so as to face the glass base plate; a means for calculating the vale of the coordinate 21 calculating the coordinate of the central point of the mask 2; and a correction value calculation means 22 calculating the difference between the coordinate of the central point of the mask 2 and the coordinate of the central point of the glass base plate 1. The position of the glass base plate 1 and/or the mask 2 is corrected by using the difference of the value of the coordinates as a correction value. COPYRIGHT: (C)2005,JPO&NCIPI