| 摘要 |
PROBLEM TO BE SOLVED: To provide an angle-of-diffraction measuring method capable of simply measuring the angle of refraction of an object to be measured. SOLUTION: In the method for measuring the angle-of-diffraction of the object 6 to be measured, an optical microscopic apparatus 20 is used. This apparatus 20 is equipped with an illumination means 3 having a lens 2 for converging the illumination light from a light source 1 to a converging point 4, a stand 5 provided at a position receiving the illumination light from the lens 2 on this side of the point 4 to receive the object 6 to be measured and an object lens 10 arranged so that the illumination light transmitted through the object 6 to be measured is converged to the point 4 to to be allowed to be incident. The object 6 to be measured is irradiated with illumination light by the illumination means 3 and, after a diffracted image is formed on a surface to measure the interval between the converging point and the reference point on the diffracted image, a straight line showing the correlation of the interval with the distance from a fixed point 15 to the position of the lens 2 is calculated to calculate the angleθ1 of diffraction formed by the straight line and an x-axis as the angle of diffraction of the object 6 to be measured. In this case, the angleθ1 of diffraction of the object to be measured can be measured without directly measuring. COPYRIGHT: (C)2005,JPO&NCIPI
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