CARBON PROTECTION FILM, METHOD FOR DEPOSITING THE SAME, MAGNETIC RECORDING MEDIUM HAVING THE CARBON PROTECTION FILM, MAGNETIC HEAD, AND MAGNETIC STORAGE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a carbon protection film of excellent smoothness and film quality and high hardness which can be thinned, and a method for depositing the same. SOLUTION: An arc discharge plasma jet film deposition apparatus 10 comprises a plasma torch 11, a vacuum chamber 12, a substrate holding stand 14 to hold a substrate 13 provided facing the plasma torch 11 in the vacuum chamber 12, and a powder feeder 15 to feed carbon particles as raw material of a carbon protection film to the plasma torch 11. Arc discharge is generated in the plasma torch 11, and carbon particles are fed into the generated plasma together with carrier gas. Carbon particles are converted into carbon ions, and radiated on the substrate 13 as plasma jet to deposit the carbon protection film thereon. COPYRIGHT: (C)2005,JPO&NCIPI