| 摘要 |
PROBLEM TO BE SOLVED: To easily seal a door mechanism for a barrel type substrate holder against a vacuum chamber, which charges/discharges the barrel-type substrate holder to/from a vacuum chamber. SOLUTION: This vacuum film-forming apparatus drives a traveling means 26 for supporting a barrel type substrate holder 10 in the front, by a motor 60 for travel; and by driving the traveling means 26 toward the front, accommodates the barrel type substrate holder 10 in the vacuum chamber 2 and also tightly contacts the door mechanism 23 for the barrel type substrate holder with the vacuum chamber 2 side. Thereby, the apparatus can make the door mechanism 23 for the barrel type substrate holder tightly contact with the vacuum chamber 2 by the driving force of the motor 60 for travel, and consequently eliminate a clamping mechanism for tightly contacting the door mechanism 23 with the vacuum chamber 2. COPYRIGHT: (C)2005,JPO&NCIPI
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