| 发明名称 |
Laser beam processing machine |
| 摘要 |
A laser beam processing machine comprising a chuck table for holding a workpiece and a laser beam application means for applying a laser beam to the workpiece held on the chuck table, wherein the machine further comprises a protective film forming means for forming a protective film on the to-be-processed surface of the workpiece before laser beam processing.
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| 申请公布号 |
US2004211762(A1) |
申请公布日期 |
2004.10.28 |
| 申请号 |
US20040827284 |
申请日期 |
2004.04.20 |
| 申请人 |
SEKIYA KAZUMA;YOSHIKAWA TOSHIYUKI |
发明人 |
SEKIYA KAZUMA;YOSHIKAWA TOSHIYUKI |
| 分类号 |
B23K26/08;B23K26/10;B23K26/18;B23K26/40;B23K26/42;B23K37/047;B23K101/40;B28D1/22;B28D5/00;H01L21/78;(IPC1-7):B23K26/00 |
主分类号 |
B23K26/08 |
| 代理机构 |
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