Drive device of liquid droplet discharge head, film manufacturing apparatus, drive method of liquid droplet discharge head, film manufacturing method, and electronic equipment and device production method

摘要

This drive device of a liquid droplet discharge head inhibits deterioration of a piezoelectric vibrator, enabling stable liquid droplets to be discharged from the liquid droplet discharge head over a long period of time. This drive device of a liquid droplet discharge head is provided with a piezoelectric vibrator 20 that extends and retracts according to a predetermined drive waveform, a drive control circuit 10 that functions as a drive control unit, and a drive wave generation circuit 30. The drive control circuit 10 drives the piezoelectric vibrator 20 by generating a drive waveform that is free of sharp edges and composed of a curved waveform based on a waveform generated by the drive waveform generation circuit 30.