| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a temperature sensor capable of stably keeping the oxygen concentration in the atmosphere of a thermistor element by forming an oxide film of a sufficient thickness on a metallic member surrounding the thermistor element. SOLUTION: In a 1st heat treatment process, the surface of a metallic tube 3 etc., used for the temperature sensor 1 are oxidized in the atmosphere for forming the oxide film of the sufficient thickness. Further in a 2nd heat treatment process, the oxide film is formed substantially from chromium oxide, and the film becomes sufficiently thicker and continuous. Therefore, with this temperature sensor 1 there is no progress of new oxidation while peeling the oxide film formed on the surface of each metallic envelope member 3, 4, and 8. The progress of oxidation of each metallic envelop member 3, 4, and 8, generating at a high temperature can be restrained. Consequently, the oxygen concentration in the atmosphere around the thermistor element exposed to a closed space formed by the metallic tube 3, etc., can be stably maintained. COPYRIGHT: (C)2005,JPO&NCIPI
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