| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical system capable of illuminating a plurality of solid-state image sensors and having an exit pupil which is variable in location and diameter and to provide a solid-state image sensor lighting apparatus using the same and a solid-state image sensor inspection method. SOLUTION: An image of a primary illumination face 6 illuminated by an illumination optical system 10 is imaged in a face to be illuminated 30 in the optical system 20. The optical system 20 comprises both an optical path dividing means 21 and an optical axis interval adjusting means. The optical path dividing means 21 divides the image of the primary illumination face 6 into a plurality of optical paths, and the optical axis interval adjusting means comprises an optical path length adjusting optical system. Without changing the interval between the primary illumination face 6 and the face to be illuminated 30, by adjusting the interval between images of the primary illumination face 6 each formed on the face to be illuminated 30 in a plurality of the optical paths, the images are formed in the face to be illuminated 30. COPYRIGHT: (C)2005,JPO&NCIPI
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