EVAPORATION MASK AND EVAPORATION METHOD USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an evaporation mask which enables repetitive use of an existing evaporation mask when evaporating an evaporant material for forming back plates on a prescribed number or more of evaporation target members and enables cost reduction, and an evaporation method using the same. SOLUTION: The evaporation mask 12 has a plurality of apertures 15 for forming a prescribed evaporation pattern on a translucent substrate 10 by evaporating the evaporant material 4 stored inside an evaporant material-storage vessel 3 and a plurality of mask parts 16 for blocking the formation of the evaporation pattern on the translucent substrate 10. Thin films 39 are formed through organic vapor deposition on the inner wall surface 37 of the aperture 15 and on the rear part 38 of the mask part 16 which is included in the mask part 16 region. COPYRIGHT: (C)2005,JPO&NCIPI