| 摘要 |
A method and apparatus for the recovery of by product gases used in a vacuum metal treatment process or other gas treatments processes are disclosed. The present invention is normally carried out in a process chamber in the last stage of the process, after vacuum processing. The chamber is filled with an inert gas for cooling down the processed metal or other materials load at a certain predetermined pressure. The chamber is connected to a receiver having a pressure control device and a mechanism capable of changing its volume in order to keep constant pressure during the passage of gas from the chamber into the receiver. In addition, there is a cooling or heat transfer device to reduce the recovering gas temperature between the chamber and the receiver. The gas flow is driven by the excess pressure in the chamber during a first transfer period, or by the vacuum pumping system during the last gas transfer period. Once the gas is contained in the receiver, this is connected to an intake of a high performance compressor, which in time will accomplish the gas transfer from constant pressure to high pressure containers.
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