发明名称 FLOW CONVERSION DEVICE, FLOW CONVERSION METHOD, MANUFACTURING PROCESS CONTROL SYSTEM, AND METHOD AND PROGRAM FOR CONTROLLING MANUFACTURING PROCESS
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a flow conversion device that can efficiently move a process flow. <P>SOLUTION: A flow division part 15 divides a process described in a conversion target process flow into lower processes according to a process division table and generates an intermediate lower process flow. A compatible flow generation part 16 replaces the lower process with a lower compatible process according to a lower process compatible table showing the lower compatible process of a manufacturing line 40 equivalent to the lower process, and it adds an intermediate lower compatible process flow thereto. A flow check part 17 generates a lower process flow usable for the manufacturing line 40 from the intermediate lower process flow and the intermediate lower compatible process flow according to a usable process table. A flow selection part 18 calculates attributes on the basis of an attribute definition table defining the attributes of the lower process and selects the lower process flow. An external storage device 20 stores the process division table, the lower process compatible table, the usable table, and the attribute definition table. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2004304044(A) 申请公布日期 2004.10.28
申请号 JP20030097008 申请日期 2003.03.31
申请人 TOSHIBA CORP 发明人 SATOGUCHI YUUICHI;HARAKAWA SHOICHI;ASAMURA TAKESHI;KITAJIMA KOJI
分类号 H01L21/02;G05B19/418;(IPC1-7):H01L21/02 主分类号 H01L21/02
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