| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer apparatus and a method of manufacturing objects for transferring the manufacturing objects being in a carrier transferred during the processes by positively replacing these objects in the sequence for putting into the processes. SOLUTION: In the transfer apparatus 16 for manufacturing objects, the carrier 15 storing a plurality of manufacturing objects transferred during a plurality of processes is fetched into the relevant process, and thereafter a plurality of manufacturing objects within the carrier 15 are transferred to a single-wafer transfer conveyor 18 for transferring the manufacturing object W to the manufacturing apparatus allocated in the processes with the single wafer transfer method. This transfer apparatus also comprises a manufacturing object shifting means 100 which is allocated within the processes, and shifts the manufacturing objects by fetching into the relevant process the carrier 15 storing a plurality of manufacturing objects transferred during the processes. COPYRIGHT: (C)2005,JPO&NCIPI
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