RIB-SHAPED OBJECT FORMING DEVICE AND RIB-SHAPED OBJECT FORMING METHOD

摘要

PROBLEM TO BE SOLVED: To prevent scratch and damage of a base plate even if the blade is moved in the direction of the substrate in the state of being strongly pressed. SOLUTION: A cushion material 21 having air permeability is provided on the top of a stand 12. A base plate 1 is mounted on the cushion material 21 and by operating a vacuum pump, air is sucked through the pores of the base board 12 and the vent holes of the cushion material 21, thereby, the base plate 1 is supported elastically on the base board 12 through the cushion material 21. Since the pressure of the blade acting on the base plate 1 is cushioned by the elasticity of the cushion material 21 when the blade is moved, the substrate 1 is not scratched or damaged. COPYRIGHT: (C)2005,JPO&NCIPI