| 发明名称 |
METHODS FOR FORMING COATINGS ON MEMS DEVICES |
| 摘要 |
A chemical approach for the attachment of molecules on a surface of a MEMS device, preferably, to provide a monolayer film thereon of relatively low surface energy. |
| 申请公布号 |
WO2004033364(A3) |
申请公布日期 |
2004.10.28 |
| 申请号 |
WO2003US32250 |
申请日期 |
2003.10.10 |
| 申请人 |
REGENTS OF THE UNIVERSITY OF MINNESOTA;MICROSURFACES, INC. |
发明人 |
ZHU, XIOYANG;JUN, YONGSEOK;YAN, HONGWEI |
| 分类号 |
B05D1/18;B05D7/24;B81B3/00;B81C1/00;C23C14/12 |
主分类号 |
B05D1/18 |
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