发明名称 |
Bearing for optical element connected to holder in microlithography projection lens, compensates for aberration by optical element tilting to holder when thermally expanding |
摘要 |
<p>The optical element (20) and the holder (21) are connected together so that thermal expansion of the optical element and/or the holder causes the optical element to tilt to the holder so that aberration is compensated. The optical element may be a lens, reflector or beam splitter.</p> |
申请公布号 |
DE10316590(A1) |
申请公布日期 |
2004.10.28 |
申请号 |
DE2003116590 |
申请日期 |
2003.04.11 |
申请人 |
CARL ZEISS SMT AG |
发明人 |
WEBER, ULRICH;SCHOEPPACH, ARMIN |
分类号 |
G02B7/00;G03F7/20;(IPC1-7):G02B7/00 |
主分类号 |
G02B7/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|