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发明名称
OPTICAL ELEMENT FOR FORMING AN ARC-SHAPED FIELD
摘要
申请公布号
EP1470450(A1)
申请公布日期
2004.10.27
申请号
EP20030714718
申请日期
2003.01.27
申请人
CARL ZEISS SMT AG
发明人
SINGER, WOLFGANG;ANTONI, MARTIN;WANGLER, JOHANNES;ESCUDERO SANZ, ISABEL
分类号
G03F7/20;G21K1/06;(IPC1-7):G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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