Driving apparatus, optical system, exposure apparatus and device fabrication method

摘要

An optical element (1) is held by a supporting unit (2) through three holders (3), such that the difference between angle of the holders in a rotational direction around rotational axis and angle of each three linking portions corresponding to the holders is lesser than 10[deg]. Independent claims are also included for the following: (1) optical system; (2) exposure apparatus; (3) semiconductor device fabrication method; and (4) optical element supporting and driving apparatus.