DISK-LIKE SUBSTRATE SPUTTERING DEVICE, SUBSTRATE CHUCKING METHOD IN THE DEVICE, METHOD OF PRODUCING DISK-LIKE RECORDING MEDIUM USING THE DEVICE,申请号KR20047013886-传众专利搜索

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发明名称	DISK-LIKE SUBSTRATE SPUTTERING DEVICE, SUBSTRATE CHUCKING METHOD IN THE DEVICE, METHOD OF PRODUCING DISK-LIKE RECORDING MEDIUM USING THE DEVICE
摘要
申请公布号	KR20040091105(A)	申请公布日期	2004.10.27
申请号	KR20047013886	申请日期	2003.03.07
申请人		发明人
分类号	C23C14/06;G11B7/26;C23C14/04;C23C14/34;C23C14/50	主分类号	C23C14/06
代理机构		代理人
主权项
地址

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