Method for producing a quartz glass jig

摘要

Production of a quartz glass jig involves processing a quartz glass raw material into a desired shape by a fire working, annealing for stress removal and a cleaning treatments to obtain the final product. A gas phase etching step and a gas phase purification step on a surface layer of the quartz glass jig is performed after applying the annealing for stress removal but before the cleaning treatment. The gas phase purification step is carried out continuously or simultaneously after or with the gas phase etching step.