Method of determining organic additives in an electroplating bath
摘要
<p>The working electrodes (3) immersed in each electroplating bath samples, are plated with metal ions until the time sufficient to measure change in energy output is reached. Quantity of the brightener and ratio of brightener to leveler are correlated with initial energy output and change in energy output, respectively to determine the unknown quantity of brightener and leveler in the bath.</p>
申请公布号
EP1471347(A1)
申请公布日期
2004.10.27
申请号
EP20040252226
申请日期
2004.04.16
申请人
ROHM AND HAAS ELECTRONIC MATERIALS, L.L.C.
发明人
SONNENBERG, WADE;BARSTAD, LEON R.;CRUZ, RAYMOND;HAMM, GARY;KAPECKAS, MARK J.;REDDINGTON, ERIK;PRICE, KATIE;BUCKLEY, THOMAS;GOODRICH, TREVOR