发明名称 |
COMPOSITION, METHOD AND UNIT FOR GENERATION OF PHOSPHINES-CONTAINING GAS, AND A METHOD FOR PREPARATION OF METALLOPHOSPHIDE COMPOSITION |
摘要 |
A process and apparatus is disclosed for generating a mixture of phosphine and diluent gas(es). A hydrolysable metal phosphide, preferably magnesium phosphide, is released directly into liquid water under an atmosphere of gas inert to phosphine and in a free-flowing particulate form, composed of loose metal phosphide particles. The generated mixture of phosphine and inert carrier gas, e.g. CO2, is used as such or is diluted into a gas mixing chamber with air to a concentration below the ignitability limit before being used in fumigation. Using argon as a carrier gas the phosphine mixture is suitable for semiconductor doping. |
申请公布号 |
RU2238905(C2) |
申请公布日期 |
2004.10.27 |
申请号 |
RU19960111417 |
申请日期 |
1996.06.07 |
申请人 |
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发明人 |
KHORN FEKHA FRANTSISKUS;REJKHMUT KRISTOF |
分类号 |
A01M17/00;A01N25/18;A23B9/18;A23L3/3409;A23L3/358;B01J4/00;B01J7/02;B01J19/14;C01B25/06;C01B25/08;C07F9/00 |
主分类号 |
A01M17/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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