发明名称 Embedded copper interconnection structure
摘要 The embedded interconnections (15) of copper in an insulating layer (10) over a substrate, have protective silver films (17). The embedded interconnections are covered by another insulating layer. Independent claims are also included for the following: (1) multilayer embedded copper interconnection structure; and (2) method of forming embedded interconnections of copper.
申请公布号 EP1471572(A1) 申请公布日期 2004.10.27
申请号 EP20040018231 申请日期 1998.09.18
申请人 EBARA CORPORATION 发明人 OGURE, NAOAKI;INOUE, HIROAKI
分类号 H01L23/52;H01L21/288;H01L21/3205;H01L21/768;H01L23/532 主分类号 H01L23/52
代理机构 代理人
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