| 发明名称 |
Projection optical system |
| 摘要 |
<p>The projection optical system is arranged such that the intermediate image of the pattern formed on the mask is, formed at a portion of light path between convex mirror (M3) and concave mirror (M4). Independent claims are included for the following: (1) exposure apparatus; (2) method for manufacturing microdevice; and (3) optical system.</p> |
| 申请公布号 |
EP1471389(A2) |
申请公布日期 |
2004.10.27 |
| 申请号 |
EP20040252392 |
申请日期 |
2004.04.23 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
SASAKI, TAKAHIRO;SUZUKI, MASAYUKI |
| 分类号 |
G02B17/00;G03F7/20;G02B17/06;H01L21/027;(IPC1-7):G03F7/20 |
主分类号 |
G02B17/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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