Configuration in which wafers are individually supplied to fabrication units and measuring units located in a fabrication cell

摘要

A configuration for treating wafers in at least one clean room includes a configuration of production units and measuring units that receive wafers via a transport system for transporting cassettes. Several functionally allocated production units and/or measuring units are combined to form a manufacturing cell which is provided with a loading and unloading station for receiving and forwarding cassettes with wafers. Individual wafers can be supplied to the production units and/or measuring units within the manufacturing cell in order to be treated.