发明名称 |
Device and method for exhaust air processing, in particular, for clean room devices |
摘要 |
A device for exhaust air processing of clean rooms has a least one fresh air supply and at least one exhaust air device connected to a work room. At least one processing device is arranged in the work room. At least one supply line and at least one exhaust air line are connected to the processing device. At least one first filter is arranged in the at least one exhaust air line of the processing device, wherein the at least one exhaust air line is connected at least to one of the supply line of the processing device and the fresh air supply line of the work room.
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申请公布号 |
US6808546(B2) |
申请公布日期 |
2004.10.26 |
申请号 |
US20020064984 |
申请日期 |
2002.09.06 |
申请人 |
M+W ZANDER FACILITY ENGINEERING GMBH |
发明人 |
SCHOTTLER MARTIN |
分类号 |
F24F3/16;(IPC1-7):F24F7/00 |
主分类号 |
F24F3/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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