发明名称 Optical waveguide and method for preparing the same
摘要 A polymeric optical waveguide substrate includes a first region provided thereon with a polymer optical waveguide and an optical waveguide-free second region, the first and second regions being on the same substrate, wherein an adhesive layer is between the lowermost polymer layer constituting the optical waveguide in the first region and the substrate, and wherein a groove intrudes into the substrate at the boundary between the first and second regions. A method for preparing the waveguide substrate includes the steps of applying an adhesive layer onto the first region while the second region is free of any adhesive layer; applying a polymer onto the whole surface of the substrate to give a polymer layer for forming an optical waveguide following the formation of the adhesive layer; cutting the polymer layer at the boundary between the first and second regions; and peeling off or removing the polymer on the second region.
申请公布号 US6810189(B2) 申请公布日期 2004.10.26
申请号 US20020120185 申请日期 2002.04.11
申请人 HITACHI, LTD.;HITACHI ULSI SYSTEMS, CO., LTD.;HITACHI CHEMICAL CO., LTD. 发明人 IDO TATEMI;NAGARA TAKAMITSU;KIMURA TADAHIRO;TAKAHASHI TOORU
分类号 H01S5/026;G02B6/12;G02B6/122;G02B6/13;G02B6/42;H01L31/0232;(IPC1-7):G02B6/10 主分类号 H01S5/026
代理机构 代理人
主权项
地址